The University of Texas at Austin UT Acoustic MEMS GroupHall Lab

Publications

Journal articles, conference papers, meeting abstracts, preprints and patents.

2026

  1. preprint
    Mechanical frequency combs via three-wave-mixing parametric excitation: a scalable inertial-sensing modality
    Z. Liu, X. Gao, Y.-C. Wang, X. Niu, E. Vatankhah, M. Kang, S. Madan, Y. Meng, R. Lu, A. Alù, D. Burghoff, N. A. Hall
    Research Square (preprint) (2026)
  2. preprint
    Modeling and design of a diaphragm-integrated photonic waveguide microphone
    X. Niu, Y. Meng, Z. Liu, E. Vatankhah, N. A. Hall
    arXiv (2026)
  3. preprint
  4. preprint
    High-velocity whip-mode microresonator in LTOI unimorph: measurement methodology and large-signal characterization
    T.-H. Hsu, Z. Liu, H. Gupta, Z. Yao, W. Wang, V. Chulukhadze, J. Kramer, N. A. Hall, R. Lu
    arXiv (2026)
  5. preprint
  6. journal
    High-temperature characterization of bimorph X-cut lithium niobate piezoelectric micromachined ultrasonic transducers up to 1000 °C
    Z. Liu, V. Chulukhadze, Y.-C. Wang, Z. Yao, L. Matto, T.-H. Hsu, N. Ravi, X. Niu, M. E. Liao, M. S. Goorsky, R. Lu, N. A. Hall
    APL Electronic Devices 2, 046102 (2026)
  7. journal
    800 °C open-air electrical characterization of III-N HEMTs using rapid dual-frequency extraction
    Z. Liu, Y.-C. Wang, M. Thurston, S. Chowdhury, R. Lu, N. A. Hall
    APL Electronic Devices 2, 036112 (2026)
  8. journal
    An integrated monolithic photonic accelerometer with on-chip fringe-counting
    Y. Meng, Q. Hu, E. Vatankhah, Z. Liu, W. Wang, N. A. Hall
    Microsystems & Nanoengineering 12, 273 (2026) Cover article, August 2026
  9. journal
    Design and characterization of a magnetostrictive hydrophone for low-frequency, low-noise underwater acoustic sensing
    E. Vatankhah, Y. Meng, Z. Liu, X. Niu, N. A. Hall
    The Journal of the Acoustical Society of America 159(4), 3259 (2026) Cover article, April 2026
  10. journal
    High-velocity laser Doppler vibrometry measurements on an aluminum nitride bimorph wedge resonator
    Z. Liu, X. Niu, E. Vatankhah, Y. Meng, S. Kim, R. Lu, A. Alù, N. A. Hall
    Communications Engineering 5, 48 (2026)
  11. journal
    Thickness-field excited bimorph lithium niobate piezoelectric transducer
    V. Chulukhadze, Z. Liu, L. Matto, Z. Yao, M. Liao, T.-H. Hsu, M. S. Goorsky, N. A. Hall, R. Lu
    Journal of Microelectromechanical Systems 35(5), 762 (2026)
  12. journal
    Bimorph lithium niobate piezoelectric micromachined ultrasonic transducers
    V. Chulukhadze, Z. Liu, Z. Yao, L. Matto, T.-H. Hsu, N. Ravi, X. Niu, M. E. Liao, M. S. Goorsky, N. A. Hall, R. Lu
    IEEE Transactions on Ultrasonics 73(5), 574 (2026)
  13. abstract
    Automated discovery of electrode layouts for piezoelectric microphone optimization
    W. Leskowitz, E. Vatankhah, Y. Meng, Z. Liu, Y.-C. Wang, Z. Yan, N. A. Hall
    The Journal of the Acoustical Society of America 159, A176 (2026)
  14. abstract
    Observation of rotational Doppler effect on a MEMS diaphragm in a deep subwavelength regime
    W. Wang, Z. Liu, Y.-C. Wang, N. A. Hall
    The Journal of the Acoustical Society of America 159, A170 (2026)
  15. patent
    Transducer probe for direct ultrasonic neuromodulation and measurement
    N. A. Hall, Z. Liu, E. Vatankhah, Y. Meng, X. Niu
    U.S. Patent Application Publication US 2026/0061226 A1 (2026)
  16. journal

2025

  1. journal
    Fly-inspired directional MEMS microphone with omnidirectionality and two in-plane orthogonal directivities
    X. Niu, Z. Liu, Y. Meng, E. Vatankhah, D. Kim, M. Kuntzman, W. Leskowitz, N. A. Hall
    IEEE Sensors Journal 25(24), 44535–44546 (2025)
  2. journal
    Lithium niobate microphone with high SNR potential
    X. Niu, V. Chulukhadze, Z. Liu, E. Vatankhah, Y. Wang, Y. Meng, L. Matto, M. S. Goorsky, R. Lu, N. A. Hall
    IEEE Sensors Journal 25(10), 18115 (2025)
  3. journal
    Characterization and modeling of an AlN piezoelectric fly-inspired in-plane directional MEMS microphone packaged with an integrated circuit amplifier
    X. Niu, C. A. Stalder, Z. Liu, Y. Meng, E. Vatankhah, N. A. Hall
    IEEE Sensors Journal 25(13), 25459 (2025)
  4. journal
    A novel cantilever-based silicon photonic accelerometer using Mach–Zehnder interferometer targeting 10-ng/√Hz noise floor
    Y. Meng, E. Vatankhah, X. Niu, Z. Liu, N. A. Hall
    IEEE Sensors Journal 25(7), 10942–10948 (2025)
  5. journal
  6. conference
    Bimorph lithium niobate piezoelectric micromachined ultrasonic transducer
    Z. Yao, V. Chulukhadze, Z. Liu, X. Niu, T.-H. Hsu, B. Kim, N. A. Hall, R. Lu
    IEEE International Ultrasonics Symposium (IUS) (2025)
  7. conference
    Planar single-layer lithium niobate piezoelectric transducer with no passive layer
    V. Chulukhadze, Z. Yao, N. Ahmed, Z. Liu, X. Niu, T.-H. Hsu, N. A. Hall, R. Lu
    Transducers 2025 (23rd Int. Conf. on Solid-State Sensors, Actuators and Microsystems) (2025)
  8. conference
    Characterization of an immersion lithium niobate piezoelectric micromachined ultrasound transducer using laser Doppler vibrometry and hydrophone measurements
    Z. Liu, X. Niu, E. Vatankhah, Y. Meng, R. Lu, N. A. Hall
    Proceedings of Meetings on Acoustics 56, 030002 (2025)
  9. conference
    Dynamic characterization of a magnetostrictive-based accelerometer using Terfenol-D
    E. Vatankhah, Y. Meng, X. Niu, Z. Liu, N. A. Hall
    Proceedings of Meetings on Acoustics 56, 065002 (2025)
  10. abstract
    Novel optomechanical microphones using integrated photonics waveguide
    Y. Meng, E. Vatankhah, Z. Liu, X. Niu, N. A. Hall
    The Journal of the Acoustical Society of America 158(4 Suppl.), A66 (2025)
  11. abstract
    Magnetostrictive-based jerk sensor: experimental characterization and analytical estimation of sensitivity
    E. Vatankhah, Y. Meng, X. Niu, Z. Liu, N. A. Hall
    The Journal of the Acoustical Society of America 157(4 Suppl.), A73 (2025)
  12. abstract
    A fly-inspired multi directional MEMS microphone
    X. Niu, D. Kim, Z. Liu, Y. Meng, E. Vatankhah, N. A. Hall
    The Journal of the Acoustical Society of America 157(4 Suppl.), A193 (2025)
  13. abstract
    A cantilever beam-based optomechanical inertial sensor in silicon nitride photonics platform
    Y. Meng, X. Niu, E. Vatankhah, Z. Liu, N. A. Hall
    The Journal of the Acoustical Society of America 157(4 Suppl.), A148 (2025)
  14. abstract
    Lithium niobate microphone with high SNR potential
    X. Niu, V. Chulukhadze, Z. Liu, E. Vatankhah, Y. Wang, Y. Meng, L. Matto, M. S. Goorsky, R. Lu, N. A. Hall
    The Journal of the Acoustical Society of America 157, A147 (2025)

2023

  1. conference
    Measurement of airborne ultrasound using laser Doppler vibrometry
    Z. Liu, X. Niu, Y. Meng, E. Vatankhah, D. Kim, N. A. Hall
    Society for Experimental Mechanics Annual Conference (Computer Vision & Laser Vibrometry, Vol. 6) 121–126 (2023) IMAC XLI Best Paper Award, 2nd place
  2. conference
    Magnetoelastic vibration sensors
    E. Vatankhah, C. Hodges, X. Niu, Z. Liu, Y. Meng, A. S. Belyakov, N. A. Hall
    Society for Experimental Mechanics Annual Conference 25–29 (2023)
  3. conference
    State-space modeling of nonlinear electrostatic transducers and experimental characterization using LDV
    Y. Meng, X. Niu, R. P. Williams, E. Vatankhah, Z. Liu, N. A. Hall
    Society for Experimental Mechanics Annual Conference 259–264 (2023)
  4. abstract
    Characterization of high intensity progressive ultrasound beams in air at 300 kHz
    E. Vatankhah, Y. Meng, Z. Liu, X. Niu, N. A. Hall
    The Journal of the Acoustical Society of America 153(5), 2878 (2023)

2022

  1. journal
    An air-coupled electrostatic ultrasound transducer using a MEMS microphone architecture
    X. Niu, Z. Liu, Y. Meng, C. M. Hodges, R. P. Williams, N. A. Hall
    Journal of Microelectromechanical Systems 31(5), 813–819 (2022)
  2. abstract
    MEMS microphones as ultrasonic transducers
    X. Niu, Y. Meng, Z. Liu, E. Vatankhah, N. A. Hall
    The Journal of the Acoustical Society of America 152(4 Suppl.), A50–A51 (2022)
  3. abstract
    Experimental characterization of high intensity progressive ultrasound beams in air
    Y. Meng, E. Vatankhah, Z. Liu, X. Niu, R. P. Williams, N. A. Hall
    The Journal of the Acoustical Society of America 152(4 Suppl.), A51 (2022)
  4. journal
    Multidegree-of-freedom state-space modeling of nonlinear pull-in dynamics of an electrostatic mems microphone
    R. P. Williams, E. Vatankhah, N. A. Hall
    Journal of Microelectromechanical Systems 31 (4), 589-598 (2022)
  5. patent
    Focal Point Determination Based on Nonlinear Mixing of Sound Beams
    N. A. Hall, R. P. Williams, E. Vatankhah
    US Patent App. 17/505,195 (2022)
  6. patent
    Nonlinear Mixing of Sound Beams for Focal Point Determination
    N. A. Hall, R. P. Williams, E. Vatankhah
    US Patent App. 17/505,145 (2022)

2020

  1. journal
    On-diaphragm thermistor for high-temperature dynamic pressure sensors
    Y. Seo, D. Kim, N. A. Hall
    IEEE Sensors Journal (2020)
  2. journal
    An energy-efficient time-domain incremental zoom capacitance-to-digital converter
    X. Tang, S. Li, X. Yang, L. Shen, W. Zhao, R. P. Williams, J. Liu, Z. Tan, N. A. Hall, et al.
    IEEE Journal of Solid-State Circuits 55 (11), 3064-3075 (2020)
  3. journal
    Monolayer Graphene Grown on Nanoscale Pt Films Deposited on TiO2 Substrates for Micro-and Nanoelectromechanical Systems
    J. H. Cho, Y. Seo, A. Dolocan, N. A. Hall, M. A. Cullinan
    ACS Applied Nano Materials 3 (10), 9731-9739 (2020)
  4. journal
    Micromachined piezoresistive-sensed diaphragms for infrasonic monitoring
    Y. Seo, R. P. Williams, C. A. Stalder, D. Kim, N. A. Hall
    IEEE Sensors Journal 21 (1), 257-264 (2020)
  5. abstract
    Engineering an optical microphone for consumer electronics
    N. A. Hall
    The Journal of the Acoustical Society of America 148 (4_Supplement), 2639 (2020)

2019

  1. journal
    Piezoelectric pressure sensors for hypersonic flow measurements
    Y. Seo, D. Kim, N. A. Hall
    Journal of Microelectromechanical Systems 28(2), 271–278 (2019)
  2. journal
    A shear-stress sensor for hypersonic flow measurements
    D. Kim, N. A. Hall
    Journal of Microelectromechanical Systems (2019)
  3. journal
    A Thévenin-inspired approach to multiple scattering in acoustics
    R. P. Williams, N. A. Hall
    Journal of Vibration and Acoustics 141(1) (2019)
  4. conference
    High-temperature piezoelectric pressure sensors for hypersonic flow measurements
    Y. Seo, D. Kim, N. A. Hall
    Transducers / Eurosensors XXXIII, Berlin (2019) Outstanding Paper Award, poster category
  5. conference
    Grating-based acceleration sensors with optical interferometric readout and closed-loop control
    R. P. Williams, B. Avenson, N. A. Hall
    Transducers / Eurosensors XXXIII, Berlin (2019)
  6. conference
    18.2 A 16fJ/conversion-step time-domain two-step capacitance-to-digital converter
    X. Tang, S. Li, L. Shen, W. Zhao, X. Yang, R. Williams, J. Liu, Z. Tan, N. A. Hall, et al.
    2019 IEEE International Solid-State Circuits Conference (ISSCC), 296-297 (2019)
  7. abstract
    Infrasound microphones using microfabricated piezoresistive silicon diaphragms
    R. P. Williams, Y. Seo, C. A. Stalder, B. D. Avenson, Q. S. Buoy, D. Kim, N. A. Hall
    The Journal of the Acoustical Society of America 146 (4_Supplement), 2996 (2019)
  8. abstract
    Fly-inspired microphones with piezoelectric readout
    C. A. Stalder, D. Kim, Y. Seo, N. A. Hall
    The Journal of the Acoustical Society of America 146 (4_Supplement), 2996 (2019)

2018

  1. journal
    Towards acoustic particle velocity sensors in air using entrained balloons: measurements and modeling
    R. P. Williams, D. Kim, K. L. Gleason, N. A. Hall
    The Journal of the Acoustical Society of America (2018)

2017

  1. journal
  2. journal
    On the theoretical maximum achievable signal-to-noise ratio (SNR) of piezoelectric microphones
    Y. Seo, D. Corona, N. A. Hall
    Sensors and Actuators A: Physical (2017)
  3. journal
    Surface micromachined differential piezoelectric shear-stress sensors
    R. P. Williams, D. Kim, D. P. Gawalt, N. A. Hall
    Journal of Micromechanics and Microengineering 27(1), 015011 (2017)
  4. abstract
    A biologically inspired piezoelectric microphone
    N. A. Hall, M. Kuntzman, D. Kim
    The Journal of the Acoustical Society of America 141 (5_Supplement), 3794 (2017)
  5. abstract
    Two-port network theory applied to multi-body scattering
    R. P. Williams, N. A. Hall
    The Journal of the Acoustical Society of America 141 (5_Supplement), 3795 (2017)

2016

  1. journal
    Thévenin acoustics
    R. Williams, N. A. Hall
    The Journal of the Acoustical Society of America (2016)
  2. patent
    Multi-mode microphones
    N. A. Hall, D. Kim
    US Patent 9,479,875 (2016)
  3. patent
    Multi-mode microphones
    N. A. Hall, D. Kim
    US Patent 9,503,820 (2016)
  4. patent
    Acoustic sensor
    N. A. Hall, M. L. Kuntzman, D. Kim, N. Hewa-Kasakarage
    US Patent 9,372,111 (2016)
  5. patent
    Surface micromachined microphone with broadband signal detection
    N. A. Hall, M. L. Kuntzman, K. K. Sauceda
    US Patent App. 15/111,080 (2016)
  6. abstract
    Optical displacement detection using multi-level diffraction gratings having no zeroth-order reflection
    R. P. Williams, S. K. Hord, N. A. Hall
    The Journal of the Acoustical Society of America 140 (4_Supplement), 3422 (2016)

2015

  1. journal
    Microfabrication and experimental evaluation of a rotational capacitive micromachined ultrasonic transducer
    M. L. Kuntzman, D. Kim, N. A. Hall
    Journal of Microelectromechanical Systems (2015)
  2. journal
    Micromachined in-plane pressure-gradient piezoelectric microphones
    M. L. Kuntzman, N. N. Hewa-Kasakarage, A. Rocha, D. Kim, N. A. Hall
    IEEE Sensors Journal (2015)

2014

  1. journal
    A transmission line model of back-cavity dynamics for in-plane pressure-gradient microphones
    D. Kim, M. L. Kuntzman, N. A. Hall
    The Journal of the Acoustical Society of America (2014)
  2. journal
    A theoretical and experimental comparison of 3-3 and 3-1 mode piezoelectric microelectromechanical systems (MEMS)
    D. Kim, N. N. Hewa-Kasakarage, N. A. Hall
    Sensors and Actuators A: Physical (2014)
  3. journal
    A rotational capacitive micromachined ultrasonic transducer (RCMUT) with an internally sealed pivot
    D. Kim, M. L. Kuntzman, N. A. Hall
    IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (2014)
  4. journal
    Sound source localization inspired by the ears of the Ormia ochracea
    M. L. Kuntzman, N. A. Hall
    Applied Physics Letters (2014)
  5. journal
    A broadband, capacitive, surface-micromachined, omnidirectional microphone with more than 200 kHz bandwidth
    M. L. Kuntzman, N. A. Hall
    The Journal of the Acoustical Society of America (2014)
  6. journal
    Towards a sub 15-dBA optical micromachined microphone
    D. Kim, N. A. Hall
    The Journal of the Acoustical Society of America (2014)
  7. journal
    Design and experimental evaluation of a low-noise backplate for a grating-based optical interferometric sensor
    D. Kim, C. T. Garcia, B. Avenson, N. A. Hall
    Journal of Microelectromechanical Systems (2014)
  8. journal
    Rotational capacitive micromachined ultrasonic transducers (cMUTs)
    M. L. Kuntzman, N. A. Hall
    Journal of Microelectromechanical Systems (2014)

2013

  1. journal
    Micromachined piezoelectric accelerometers via epitaxial silicon cantilevers and bulk silicon proof masses
    N. N. Hewa-Kasakarage, D. Kim, M. L. Kuntzman, N. A. Hall
    Journal of Microelectromechanical Systems (2013)
  2. journal
    Network modeling of multiple-port, multiple-vibration-mode transducers and resonators
    M. L. Kuntzman, D. Kim, N. N. Hewa-Kasakarage, K. D. Kirk, N. A. Hall
    Sensors and Actuators A: Physical (2013)
  3. journal
    Piezoelectric micromachined microphones with out-of-plane directivity
    D. Kim, N. N. Hewa-Kasakarage, M. L. Kuntzman, K. D. Kirk, S. H. Yoon, N. A. Hall
    Applied Physics Letters (2013)
  4. journal
    Electrical admittance spectroscopy for piezoelectric MEMS
    D. Kim, N. N. Hewa-Kasakarage, S. H. Yoon, K. D. Kirk, M. Kuntzman, N. A. Hall
    Journal of Microelectromechanical Systems (2013)
  5. journal
    Micromachined piezoelectric microphones with in-plane directivity
    M. L. Kuntzman, J. G. Lee, N. N. Hewa-Kasakarage, D. Kim, N. A. Hall
    Applied Physics Letters (2013)
  6. abstract
    Design optimization of a piezoelectric microphone with in-plane directivity
    M. L. Kuntzman, N. N. Hewa-Kasakarage, D. Kim, A. Rocha, N. A. Hall
    The Journal of the Acoustical Society of America 134 (5_Supplement), 4092 (2013)
  7. abstract
    Network modeling of multiple-port transducers across multiple modes of vibration
    M. L. Kuntzman, N. N. Hewa-Kasakarage, D. Kim, N. A. Hall
    The Journal of the Acoustical Society of America 134 (5_Supplement), 4185 (2013)
  8. abstract
    Experimental comparison of 3-3 and 3-1 mode piezoelectric microelectromechanical systems
    D. Kim, N. N. Hewa-Kasakarage, M. L. Kuntzman, N. A. Hall
    The Journal of the Acoustical Society of America 134 (5_Supplement), 4123 (2013)

2012

  1. journal
    Thermoacoustic sound generation from monolayer graphene for transparent and flexible sound sources
    J. W. Suk, K. Kirk, Y. Hao, N. A. Hall, R. S. Ruoff
    Advanced Materials (2012)
  2. journal
    On the minimum coupling required for maximum theoretical power capture from vibration energy harvesters
    D. Kim, N. N. Hewa-Kasakarage, S. Yoon, N. A. Hall
    Applied Physics Letters (2012)
  3. patent
  4. other
    Electrostatic MEMS microphones
    N. A. Hall
    Encyclopedia of Nanotechnology 775-783 (2012)

2011

  1. journal
    Performance and modeling of a fully packaged micromachined optical microphone
    M. L. Kuntzman, C. T. Garcia, A. G. Onaran, B. Avenson, K. D. Kirk, N. A. Hall
    Journal of Microelectromechanical Systems (2011)

2010

  1. abstract
    Commercial packaging of an optical microelectromechanical systems microphone
    M. L. Kuntzman, K. D. Kirk, C. T. Garcia, G. A. Onaran, N. A. Hall
    The Journal of the Acoustical Society of America 128 (4_Supplement), 2444 (2010)
  2. other
    Modeling and prototyping of a micromachined optical microphone
    M. L. Kuntzman
    M.S. thesis, The University of Texas at Austin (2010)
Prof. Hall’s earlier work at Georgia Tech and Sandia National Laboratories, 2000–2009 42

2009

  1. journal
    A low-noise differential microphone inspired by the ears of the parasitoid fly Ormia ochracea
    R. N. Miles, Q. Su, W. Cui, M. Shetye, F. L. Degertekin, B. Bicen, C. Garcia, et al.
    The Journal of the Acoustical Society of America 125 (4), 2013-2026 (2009)
  2. journal
    Integrated optical displacement detection and electrostatic actuation for directional optical microphones with micromachined biomimetic diaphragms
    B. Bicen, S. Jolly, K. Jeelani, C. T. Garcia, N. A. Hall, F. L. Degertekin, Q. Su, et al.
    IEEE Sensors Journal 9 (12), 1933-1941 (2009)
  3. patent
    Displacement sensor employing discrete light pulse detection
    F. L. Degertekin, W. Lee, N. A. Hall
    US Patent 7,485,847 (2009)
  4. patent
    Displacement-measuring optical device with orifice
    N. A. Hall, F. L. Degertekin
    US Patent 7,518,737 (2009)

2008

  1. journal
    Micromachined accelerometers with optical interferometric read-out and integrated electrostatic actuation
    N. A. Hall, M. Okandan, R. Littrell, D. K. Serkland, G. A. Keeler, K. Peterson, et al.
    Journal of Microelectromechanical Systems 17 (1), 37-44 (2008)
  2. patent
    Highly-sensitive displacement-measuring optical device
    F. L. Degertekin, N. A. Hall, W. Lee
    US Patent 7,440,117 (2008)
  3. journal
    Simulation of thin-film damping and thermal mechanical noise spectra for advanced micromachined microphone structures
    N. A. Hall, M. Okandan, R. Littrell, B. Bicen, F. L. Degertekin
    Journal of Microelectromechanical Systems 17 (3), 688-697 (2008)
  4. abstract
    Diffraction based optical MEMS microphones and accelerometers with active electrostatic force feedback
    B. Bicen, C. Garcia, N. A. Hall, M. Okandan, W. Cui, Q. T. Su, R. N. Miles, et al.
    The Journal of the Acoustical Society of America 123 (5_Supplement), 3230 (2008)
  5. abstract
    A low-noise biomimetic differential microphone
    R. N. Miles, Q. T. Su, W. Cui, S. A. Jones, F. L. Degertekin, B. Bicen, C. Garcia, et al.
    The Journal of the Acoustical Society of America 123 (5_Supplement), 3228 (2008)
  6. conference
    Micro-Seismometers via Advanced Mesoscale Fabrication
    N. A. Hall
    30th Monitoring Research Review: Ground-Based Nuclear Explosion Monitoring Technologies (2008)

2007

  1. journal
    Micromachined optical microphone structures with low thermal-mechanical noise levels
    N. A. Hall, M. Okandan, R. Littrell, B. Bicen, F. L. Degertekin
    The Journal of the Acoustical Society of America 122 (4), 2031-2037 (2007)
  2. journal
    Impact of relative intensity noise of vertical-cavity surface-emitting lasers on optics-based micromachined audio and seismic sensors
    R. Littrell, N. A. Hall, M. Okandan, R. Olsson, D. Serkland
    Applied Optics 46 (28), 6907-6911 (2007)
  3. conference
    Optical microphone structures fabricated for broad bandwidth and low noise
    M. Okandan, N. A. Hall, B. Bicen, C. Garcia, F. L. Degertekin
    2007 IEEE Sensors, 1472-1475 (2007)
  4. other
    Ultrasensitive Directional Microphone Arrays for Military Operations in Urban Terrain
    M. Okandan, E. P. Parker, N. A. Hall, K. Peterson, P. Resick, D. Serkland
    Technical report, Sandia National Laboratories (2007)
  5. abstract
    An integrated optical microphone test-bed for acoustic measurements
    C. T. Garcia, N. A. Hall, F. L. Degertekin, B. Bicen, K. Jeelani, M. S. Qureshi
    The Journal of the Acoustical Society of America 121 (5_Supplement), 3155-3156 (2007)

2006

  1. patent
    Highly-sensitive displacement-measuring optical device
    F. L. Degertekin, N. A. Hall, W. Lee
    US Patent 7,116,430 (2006)
  2. conference
    Optical sensing in a directional MEMS microphone inspired by the ears of the parasitoid fly, Ormia ochracea
    W. Cui, B. Bicen, N. A. Hall, S. A. Jones, F. L. Degertekin, R. N. Miles
    19th IEEE International Conference on Micro Electro Mechanical Systems, 614-617 (2006)
  3. journal
    Surface and bulk-silicon-micromachined optical displacement sensor fabricated with the SwIFT-Lite™ process
    N. A. Hall, M. Okandan, F. L. Degertekin
    Journal of Microelectromechanical Systems 15 (4), 770-776 (2006)
  4. conference
    High SNR capacitive sensing transducer
    S. Y. Peng, M. S. Qureshi, P. E. Hasler, N. A. Hall, F. L. Degertekin
    2006 IEEE International Symposium on Circuits and Systems (ISCAS) (2006)
  5. abstract
    Micromachined microphones with diffraction-based optical interferometric readout
    F. L. Degertekin, N. A. Hall, B. Bicen
    The Journal of the Acoustical Society of America 120 (5_Supplement), 3272 (2006)
  6. abstract
    The surface and bulk microfabrication of optical seismometers and vibrometers using Sandia National Laboratories’ silicon micromachining technology
    M. Okandan, N. A. Hall, R. Littrell, B. Bicen, F. L. Degertekin
    The Journal of the Acoustical Society of America 120 (5_Supplement), 3329-3330 (2006)
  7. abstract
    Finite-element modeling of thin-film damping in micromachined microphones employing diffraction based optical readout
    N. A. Hall, M. Okandan, F. L. Degertekin
    The Journal of the Acoustical Society of America 120 (5_Supplement), 3330 (2006)
  8. other
    Interferometric Sensor Platform
    M. Okandan, N. A. Hall, R. Littrell
    Technical report, Sandia National Laboratories (2006)

2005

  1. journal
    Micromachined microphones with diffraction-based optical displacement detection
    N. A. Hall, B. Bicen, M. K. Jeelani, W. Lee, S. Qureshi, F. L. Degertekin, et al.
    The Journal of the Acoustical Society of America 118 (5), 3000-3009 (2005)
  2. journal
    Sensor for direct measurement of interaction forces in probe microscopy
    F. L. Degertekin, A. G. Onaran, M. Balantekin, W. Lee, N. A. Hall, C. F. Quate
    Applied Physics Letters 87 (21) (2005)
  3. other
    MEMS integrated with optics and nanostructures for sensor applications
    N. A. Hall, G. N. Nielson, D. W. Carr, R. H. Olsson III, G. R. Bogart, et al.
    Technical report, Sandia National Laboratories (2005)

2004

  1. journal
    Fabrication and characterization of a micromachined acoustic sensor with integrated optical readout
    W. Lee, N. A. Hall, Z. Zhou, F. L. Degertekin
    IEEE Journal of Selected Topics in Quantum Electronics 10 (3), 643-651 (2004)
  2. conference
    Modeling and design of CMUTs using higher order vibration modes [capacitive micromachined ultrasonic transducers]
    N. A. Hall, R. Guldiken, J. McLean, F. L. Degertekin
    2004 IEEE Ultrasonics Symposium, Vol. 1, 260-263 (2004)
  3. journal
    A grating-assisted resonant-cavity-enhanced optical displacement detection method for micromachined sensors
    W. Lee, N. A. Hall, F. L. Degertekin
    Applied Physics Letters 85 (15), 3032-3034 (2004)
  4. other
    Micromachined broadband acoustic transducers with integrated optical displacement detection
    N. A. Hall
    Ph.D. dissertation, Georgia Institute of Technology (2004)
  5. abstract
    Micromachined microphones with integrated optical nanoscale displacement sensors
    N. A. Hall, W. Lee, M. K. Jeelani, F. L. Degertekin, M. Okandan
    The Journal of the Acoustical Society of America 116 (4_Supplement), 2511 (2004)

2003

  1. journal
    Capacitive micromachined ultrasonic transducers with diffraction-based integrated optical displacement detection
    N. A. Hall, W. Lee, F. L. Degertekin
    IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 50 (2003)
  2. conference
    Micromachined acoustic sensor array with diffraction-based optical interferometric detection
    W. Lee, N. A. Hall, F. L. Degertekin
    MOEMS Display and Imaging Systems 4985, 140-151 (2003)
  3. conference
    Micromachined acoustic sensors with integrated optoelectronic readout
    F. L. Degertekin, N. A. Hall, W. Lee
    2003 IEEE/LEOS International Conference on Optical MEMS (2003)

2002

  1. journal
    Integrated optical interferometric detection method for micromachined capacitive acoustic transducers
    N. A. Hall, F. L. Degertekin
    Applied Physics Letters 80 (20), 3859-3861 (2002)
  2. conference
    Micromachined capacitive transducers with improved optical detection for ultrasound applications in air
    N. A. Hall, W. Lee, J. Dervan, F. L. Degertekin
    2002 IEEE Ultrasonics Symposium, Vol. 2, 1027-1030 (2002)
  3. abstract
    Broadband self-calibrating micromachined microphones with integrated optical displacement detection
    N. A. Hall, W. Lee, F. L. Degertekin
    The Journal of the Acoustical Society of America 112 (5_Supplement), 2234-2235 (2002)

2001

  1. conference
    Self-calibrating micromachined microphones with integrated optical displacement detection
    N. A. Hall, F. L. Degertekin
    Transducers ’01 / Eurosensors XV, 11th International Conference on Solid-State Sensors and Actuators (2001)
  2. conference
    Capacitive micromachined ultrasonic transducers with integrated optoelectronic readout
    F. L. Degertekin, N. A. Hall, W. Lee
    2001 IEEE Ultrasonics Symposium (2001)
  3. conference
    Micromachined microphone with optical interferometric readout
    F. L. Degertekin, N. A. Hall
    2001 IEEE International Symposium on Circuits and Systems (2001)
  4. journal
    Design of an oscillating flow apparatus for the study of low Reynolds number particle dynamics
    J. A. Carter, K. M. Martin, W. B. Campbell, N. A. Hall, O. A. Ezekoye
    Experiments in Fluids 30 (5), 578-583 (2001)

2000

  1. conference
    An integrated optical detection method for capacitive micromachined ultrasonic transducers
    N. A. Hall, F. L. Degertekin
    2000 IEEE Ultrasonics Symposium (2000)

Compiled from Prof. Hall’s Google Scholar profile, November 2026. Titles without a DOI link to a Google Scholar search.

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