Group wiki
A public record of the prototyping techniques our students have worked out, so the next person starts where the last one finished. Design, fabricate, package, test.
Getting started
For new members and anyone editing this site.
- New member guide What to learn before and during your first semester, with books and tools.
- Editing this site How to add a paper, a person, a news item or a wiki page. No coding needed.
Cleanroom processes
Recipes and tool notes from the MRC cleanroom, written by the people who ran them.
- Standard photolithography AZ5214 as positive and image-reversal resist, and SU-8 3005 with an Omnicoat release layer.
- FIJI ALD (Al₂O₃) Al₂O₃ atomic layer deposition on the FIJI, with thickness results and edge-deposition tips.
- Deep silicon etch (DSE) Keeping the sample cool is everything. He flow, backside pressure, cleanliness and Fomblin oil.
- Oxford 80 RIE Fluorine RIE for SiO₂ and Al₂O₃. Operating steps, pressure limits and polymer control.
- Plasmatherm #2 (RIE) Non-fluorine RIE chamber. Simpler to run than the Oxford, but it cannot reach 30 mTorr.
Design
Mask layout and design-to-fab handoff.
- Mask design AutoCAD rules that survive conversion, KLayout GDS2 prep, alignment marks and the EVG620 template.
Measurement
Test setups in the EER lab.
No pages yet. LDV setup, hydrophone calibration and PIC fiber alignment are good first ones. Copy _templates/wiki-page.md to start.